November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
SF01.03.01
Growth of SiO2 by SMFD-ALD and Its Application in Thin-Film Capacitor
When and Where
Nov 30, 2021
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Mahesh Nepal1,Wendifer Ramos1,Tara Dhakal1
Binghamton University1
Keywords
atomic layer deposition | dielectric properties | thin film
Symposium Organizers
Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester
Symposium Support
Bronze
Waterloo Institute for Nanotechnology
Waterloo Institute for Nanotechnology
Session Chairs
Bo Li
Wyatt Tenhaeff