November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ01.03.03
Ion Implantation and In Situ Optical Characterization for Deterministic Creation of Single Defects
When and Where
Dec 1, 2021
11:00am - 11:15am
11:00am - 11:15am
Hynes, Level 1, Room 105
Presenter(s)
Co-Author(s)
Vignesh Chandrasekaran1,Michael Titze2,Anthony Flores2,Edward Bielejec2,Han Htoon1
Los Alamos National Laboratory1,Sandia National Laboratories2
Keywords
focused ion beam (FIB) | in situ
Symposium Organizers
Shengxi Huang, The Pennsylvania State University
Igor Aharonovich, University of Technology-Sydney
Abram Falk, IBM T.J. Watson Research Center
Xuedan Ma, Argonne National Laboratory
Session Chairs
Adam Gali
Shengxi Huang