November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
SF01.13.03

Atmospheric-Pressure Spatial Atomic Layer Deposition (AP-SALD) Of Metal Oxides for Gravimetric Gas Sensing Applications

When and Where

Dec 8, 2021
1:15pm - 1:30pm
SF01-Virtual

Presenter(s)

Co-Author(s)

Masoud Akbari1,Viet Huong Nguyen2,Gaëtan Debontride3,Martial Defoort1,Skandar Basrour1,Kevin Musselman4,David Munoz-Rojas1

University of Grenoble Alpes1,Phenikaa University2,CIME Nanotech/Grenoble INP3,University of Waterloo4

Keywords

oxide

Symposium Organizers

Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester

Symposium Support

Bronze
Waterloo Institute for Nanotechnology

Session Chairs

Kevin Musselman

In this Session