November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ13.11.02
Inversing the Polarity of Scandium Aluminum Nitride (ScAlN) Piezoelectric Thin Films by Using Si Addition
When and Where
Dec 7, 2021
8:30am - 8:45am
8:30am - 8:45am
EQ13-Virtual
Presenter(s)
Co-Author(s)
Sri Ayu Anggraini1,Masato Uehara1,Kenji Hirata1,Hiroshi Yamada1,Morito Akiyama1
National Institute of Advanced Industrial Science and Technology1
Keywords
III-V | sputtering
Symposium Organizers
Andriy Zakutayev, National Renewable Energy Laboratory
Bjorn Alling, Linkoping University
Rachel Oliver, University of Cambridge
Minghui Yang, Chinese Academy of Sciences
Symposium Support
Silver
Taiyo Nippon Sanso
Taiyo Nippon Sanso
Session Chairs
Debdeep Jena
Minghui Yang