November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ17.11.12
Excimer Laser Crystallization and Doping of Epitaxial Ga2O3 Thin Films for Ultraviolet Optoelectronics Devices
When and Where
Dec 6, 2021
5:25pm - 5:30pm
5:25pm - 5:30pm
EQ17-Virtual
Presenter(s)
Co-Author(s)
Kazuki Watanabe1,Ryoya Kai1,Naho Kaneko1,Shohei Hisatomi1,Tomoaki Oga1,Satoru Kaneko2,1,Akifumi Matsuda1,Mamoru Yoshimoto1
Tokyo Institute of Technology1,Kanagawa Institute of Industrial Science and Technology2
Keywords
III-V | laser annealing
Symposium Organizers
Philip Schulz, Centre National de la Recherche Scientifique
Stefaan De Wolf, King Abdullah University of Science and Technology
Alex Martinson, Argonne National Laboratory
Monica Morales-Masis, University of Twente
Session Chairs
Fan Fu
Philip Schulz