November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ13.11.04
Combinatorial Synthesis of Ferroelectric Al1-xScxN Films
When and Where
Dec 7, 2021
9:00am - 9:15am
9:00am - 9:15am
EQ13-Virtual
Presenter(s)
Co-Author(s)
Keisuke Yazawa1,2,Daniel Drury2,1,Geoff Brennecka2,Andriy Zakutayev1
National Renewable Energy Laboratory1,Colorado School of Mines2
Keywords
ferroelectricity | sputtering
Symposium Organizers
Andriy Zakutayev, National Renewable Energy Laboratory
Bjorn Alling, Linkoping University
Rachel Oliver, University of Cambridge
Minghui Yang, Chinese Academy of Sciences
Symposium Support
Silver
Taiyo Nippon Sanso
Taiyo Nippon Sanso
Session Chairs
Debdeep Jena
Minghui Yang