November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ20.03.03
BEOL Compatible MOCVD-Grown Re-Doped MoS2 for Next Generation Cu/TMD Hybrid Interconnects
When and Where
Nov 30, 2021
11:15am - 11:30am
11:15am - 11:30am
Hynes, Level 1, Room 103
Presenter(s)
Co-Author(s)
Riccardo Torsi1,Yu-Chuan Lin1,Joshua Robinson1
The Pennsylvania State University1
Keywords
metalorganic deposition | x-ray photoelectron spectroscopy (XPS)
Symposium Organizers
Zakaria Al Balushi, University of California, Berkeley
Cinzia Casiraghi, University of Manchester
Joshua Robinson, The Pennsylvania State University
Hyeon Jin Shin, Samsung Advanced Institute of Technology
Symposium Support
Silver
Penn State 2DCC-MIP
Penn State 2DCC-MIP
Session Chairs
Zakaria Al Balushi
Deep Jariwala