Diamond Etching Based on Carbon Solid Solution into Nickel for Wafer and Device Fabrication Processes

Dec 7, 2021
10:30am - 11:00am

EQ19-Virtual

Norio Tokuda

Xufang Zhang

Norio Tokuda¹,Xufang Zhang¹,Tsubasa Matsumoto¹,Takao Inokuma¹,Christoph Nebel^2,1,Satoshi Yamasaki¹

Kanazawa Univ¹,Diamond and Carbon Applications²

annealing | diamond | interface

Anke Krueger, Julius-Maximilians-Universität Würzburg

Emmanuel Scorsone, Commissariat à l’énergie atomique et aux énergies alternatives

Mariko Suzuki, University of Cádiz

Oliver Williams, Cardiff University School of Physics and Astronomy

Ken Haenen