Epitaxial Growth of (ZnO)_x(InN)_1-x Films on ZnO Substrate by Magnetron Sputtering—Impact of Substrate Surface Polarity

Dec 6, 2021
10:50pm - 10:55pm

EQ09-Virtual

Naho Itagaki

Ryota Narishige¹,Daisuke Yamashita¹,Kunihiro Kamataki¹,Takamasa Okumura¹,Kazunori Koga¹,Masaharu Shiratani¹,Naho Itagaki¹

Kyushu University¹

crystal growth | epitaxy | sputtering

Davide Mariotti, Ulster University

Rebecca Anthony, Michigan State University

Wei-Hung Chiang, National Taiwan University of Science and Technology

Chi-Chin Wu, U.S. Army Research Laboratory

Naho Itagaki

Tsuyohito Ito

Epitaxial Growth of (ZnO)x(InN)1-x Films on ZnO Substrate by Magnetron Sputtering—Impact of Substrate Surface Polarity