April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP09.08.07

Materials and Process Innovations for High-Performance Strained Silicon-Germanium FinFETs with High Ge Content

When and Where

Apr 25, 2019
10:30am - 11:00am
PCC North, 200 Level, Room 224 B

Presenter(s)

Co-Author(s)

Takashi Ando1,Pouya Hashemi1,Eduard Cartier1,John Bruley1,Vijay Narayanan1

IBM T.J. Watson Research Center1

Keywords

Ge | Si

Symposium Organizers

Rinus Lee, GlobalFoundries
Kah-Wee Ang, National University of Singapore
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
John Robertson, Cambridge University

Symposium Support

Applied Materials, Inc.

Session Chairs

Rinus Lee
John Robertson

In this Session