April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.07.02
Approaches to Area Selective Deposition for Next Generation Interconnects
Approaches to Area Selective Deposition for Next Generation Interconnects
When and Where
Apr 25, 2019
9:00am - 9:30am
9:00am - 9:30am
PCC North, 200 Level, Room 221 B
Presenter(s)
Co-Author(s)
Stacey Bent1
Stanford University1
Keywords
atomic layer deposition | self-assembly | surface chemistry
Symposium Organizers
Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES
Symposium Support
ASM International NV
CEA, LETI
Entegris, Inc
TEL
CEA, LETI
Entegris, Inc
TEL
Session Chairs
Chloe Guerin
Frank Mont