April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.03.03
Optimizing Growth of TaSe3 Nanowires via Chemical Vapor Deposition
When and Where
Apr 23, 2019
5:00pm - 7:00pm
5:00pm - 7:00pm
PCC North, 300 Level, Exhibit Hall C-E
Presenter(s)
Co-Author(s)
Aimee Martinez1,Thomas Empante1,Michelle Wurch1,Ludwig Bartels1
University of California, Riverside1
Keywords
chemical vapor deposition (CVD) (chemical reaction) | electrical properties
Symposium Organizers
Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES
Symposium Support
ASM International NV
CEA, LETI
Entegris, Inc
TEL
CEA, LETI
Entegris, Inc
TEL
Session Chairs
Silvia Armini
Vincent Jousseaume
Eiichi Kondoh
Frank Mont