April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP09.03.05
Suppression of Defects at High-K/SiGe Interface with Monolayer Si ALD Deposition
When and Where
Apr 23, 2019
5:00pm - 7:00pm
5:00pm - 7:00pm
PCC North, 300 Level, Exhibit Hall C-E
Presenter(s)
Co-Author(s)
Harshil Kashyap1,Mahmut Kavrik1,Victor Wang1,Andrew Kummel1
University of California, San Diego1
Keywords
atomic layer deposition | oxide | Si
Symposium Organizers
Rinus Lee, GlobalFoundries
Kah-Wee Ang, National University of Singapore
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
John Robertson, Cambridge University
Symposium Support
Applied Materials, Inc.
Session Chairs
Catherine Dubourdieu
Rinus Lee
John Robertson