April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
QN03.11.03
Suppressing the Growth of Out-of-Plane 3D Structures During Plasma Enhanced Atomic Layer Deposition of 2D WS2
Suppressing the Growth of Out-of-Plane 3D Structures During Plasma Enhanced Atomic Layer Deposition of 2D WS2
When and Where
Apr 25, 2019
8:30am - 8:45am
8:30am - 8:45am
PCC North, 100 Level, Room 129 A
Presenter(s)
Co-Author(s)
Shashank Balasubramanyam1,Mark van Ommeren1,Marcel Verheijen1,2,Matthew Bloodgood1,W.M.M.(Erwin) Kessels1,Ageeth Bol1
Eindhoven University of Technology1,Phillips Innovation Laboratories2
Keywords
2D materials | grain size | morphology
Symposium Organizers
Deep Jariwala, University of Pennsylvania
Victor Brar, University of Wisconsin–Madison
SungWoo Nam, University of Illinois at Urbana-Champaign
Ursula Wurstbauer, Technical University of Munich
Symposium Support
Accurion Inc.
attocube systems AG
MilliporeSigma
CreaTec GmbH, represented by Sentys Inc.
attocube systems AG
MilliporeSigma
CreaTec GmbH, represented by Sentys Inc.
Session Chairs
Deep Jariwala
SungWoo Nam