April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
CP01.08.03
In Situ Full Field Diffraction X-Ray Imaging of Buried Tilt and Strain Fields in Light Ion-Implanted Si Wafers
When and Where
Apr 25, 2019
8:45am - 9:00am
8:45am - 9:00am
PCC West, 100 Level, Room 101 A
Presenter(s)
Co-Author(s)
Antoine Petit1,Samuel Tardif2,Tao Zhou3,Frédéric Mazen1,Joël Eymery2,François Rieutord2
CEA-LETI1,CEA-INAC2,ESRF- The European Synchrotron3
Keywords
in situ | Si | x-ray diffraction (XRD)
Symposium Organizers
Jessica Krogstad, University of Illinois at Urbana-Champaign
Nan Li, Los Alamos National Laboratory
Nobumichi Tamura, Lawrence Berkeley National Laboratory
Arief Budiman, Singapore University of Technology and Design
Session Chairs
Arief Budiman
Olivier Thomas