April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
CP04.04.08

Surface Energy Measurements by Three Liquid Contact Angle Analysis Correlated with Ion Beam Analysis of Thin Silicon Oxides as a Function of Dopant Species and Concentration

When and Where

Apr 23, 2019
5:00pm - 7:00pm
PCC North, 300 Level, Exhibit Hall C-E

Presenter(s)

Co-Author(s)

Saaketh Narayan1,2,3,Jack Day1,2,3,Nikhil Suresh1,2,4,Nicole Herbots1,2,3,Robert Culbertson1,2

Arizona State University1,SiO2 Innovates, LLC2,AccuAngle Analytics, LLC3,MicroDrop Diagnostics, LLC4

Keywords

ion-implantation | oxide | Si

Symposium Organizers

Timothy Rupert, University of California, Irvine
Fadi Abdeljawad, Clemson University
Julie Cairney, The University of Sydney
Jason Trelewicz, Stony Brook University

Session Chairs

Fadi Abdeljawad
Julie Cairney
Timothy Rupert
Jason Trelewicz

In this Session