April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.04.01
High-Resolution 3D Imaging of Structures and Defects in Advanced Interconnect and Packaging Structures Using Laboratory X-Ray Tomography
When and Where
Apr 24, 2019
8:30am - 9:00am
8:30am - 9:00am
PCC North, 200 Level, Room 221 B
Presenter(s)
Co-Author(s)
Ehrenfried Zschech1,2,Kristina Kutukova1,Jendrik Silomon1,Emre Topal2,Juergen Gluch1,Markus Loeffler2
Fraunhofer Institute for Ceramic Technologies and Systems1,Technische Universität Dresden2
Keywords
defects | x-ray tomography
Symposium Organizers
Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES
Symposium Support
ASM International NV
CEA, LETI
Entegris, Inc
TEL
CEA, LETI
Entegris, Inc
TEL
Session Chairs
Young-Chang Joo
Sean King