April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP09.09.06
High Reliable High-K Dielectric Oxide-Based Nanolaminates for Next Generation Logic Analog and Memory Semiconductor Devices
When and Where
Apr 25, 2019
3:30pm - 3:45pm
3:30pm - 3:45pm
PCC North, 200 Level, Room 224 B
Presenter(s)
Co-Author(s)
Elida de Obaldia2,Yuanning Chen1,Chun Wu1,Deborah Riley1,Israel Mejia1,Jesus Alcantar2,Orlando Auciello2
MicroSol Technologies Inc.1,The University of Texas at Dallas2
Symposium Organizers
Rinus Lee, GlobalFoundries
Kah-Wee Ang, National University of Singapore
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
John Robertson, Cambridge University
Symposium Support
Applied Materials, Inc.
Session Chairs
Rinus Lee
John Robertson
Shinichi Takagi