April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.02.01

Advanced Interconnects—Materials Overview and Outlook Going Forward

When and Where

Apr 23, 2019
1:30pm - 2:00pm
PCC North, 200 Level, Room 221 B

Presenter(s)

Co-Author(s)

Andrew Simon1

IBM Research Division1

Keywords

chemical vapor deposition (CVD) (chemical reaction) | physical vapor deposition (PVD)

Symposium Organizers

Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES

Symposium Support

ASM International NV
CEA, LETI
Entegris, Inc
TEL

Session Chairs

Eiichi Kondoh
Frank Mont

In this Session