April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP09.08.08
Rapid Ge Diffusion During High Temperature Oxidation of Si/SiGe Pillars for the Formation of Si/SiGe Quantum Dots
When and Where
Apr 25, 2019
11:00am - 11:15am
11:00am - 11:15am
PCC North, 200 Level, Room 224 B
Presenter(s)
Co-Author(s)
Emily Turner1,Keshab Sapkota2,Christopher Hatem3,Kevin Jones1,George Wang2
University of Florida1,Sandia National Laboratories2,Applied Materials, Inc.3
Keywords
diffusion | oxidation | quantum materials
Symposium Organizers
Rinus Lee, GlobalFoundries
Kah-Wee Ang, National University of Singapore
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
John Robertson, Cambridge University
Symposium Support
Applied Materials, Inc.
Session Chairs
Rinus Lee
John Robertson