April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.05.02
Synthesis and Characterization of TaSe3 Nanorods via Facile CVD Processes
When and Where
Apr 24, 2019
10:45am - 11:00am
10:45am - 11:00am
PCC North, 200 Level, Room 221 B
Presenter(s)
Co-Author(s)
Thomas Empante1,Aimee Martinez1,Michelle Wurch1,Ludwig Bartels1
University of California, Riverside1
Keywords
chemical vapor deposition (CVD) (deposition) | electrical properties
Symposium Organizers
Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES
Symposium Support
ASM International NV
CEA, LETI
Entegris, Inc
TEL
CEA, LETI
Entegris, Inc
TEL
Session Chairs
Eiichi Kondoh
Shinji Yokogawa