April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.01.02

Time to Get Over the Lows—A Selectively Colorful yet Chilly Perspective on the Future of Dielectrics in Nanoelectronic Devices

When and Where

Apr 23, 2019
11:00am - 11:30am
PCC North, 200 Level, Room 221 B

Presenter(s)

Co-Author(s)

Sean King1

Intel Corp1

Keywords

dielectric properties | plasma-enhanced CVD (PECVD) (deposition)

Symposium Organizers

Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES

Symposium Support

ASM International NV
CEA, LETI
Entegris, Inc
TEL

Session Chairs

Silvia Armini
Vincent Jousseaume

In this Session