April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP09.08.02
Milisecond Flash Lamp Annealing for the Ferroelectric Phase Stabilization in HfxZr1-xO2
When and Where
Apr 25, 2019
8:15am - 8:30am
8:15am - 8:30am
PCC North, 200 Level, Room 224 B
Presenter(s)
Co-Author(s)
Mattia Halter1,2,Éamon O’Connor1,Felix Eltes1,Youri Poppoff1,3,Marilyne Sousa1,Stefan Abel1,Bert Offrein1,Jean Fompeyrine1
IBM Research GmbH1,Swiss Federal Institute of Technology Zurich2,EMPA - Swiss Federal Laboratories for Materials Science and Technology3
Keywords
annealing | oxide
Symposium Organizers
Rinus Lee, GlobalFoundries
Kah-Wee Ang, National University of Singapore
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
John Robertson, Cambridge University
Symposium Support
Applied Materials, Inc.
Session Chairs
Rinus Lee
John Robertson