April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP09.03.19
Manipulating the Electrochemical Metallization Cell Kinetics by the Anion Electrode and Tunable Electrolyte
When and Where
Apr 23, 2019
5:00pm - 7:00pm
5:00pm - 7:00pm
PCC North, 300 Level, Exhibit Hall C-E
Presenter(s)
Co-Author(s)
Ziyang Zhang1,Yaoyuan Wang1,Huanglong Li1,Luping Shi1
Tsinghua University1
Keywords
electrical properties | lithography (deposition) | thin film
Symposium Organizers
Rinus Lee, GlobalFoundries
Kah-Wee Ang, National University of Singapore
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
John Robertson, Cambridge University
Symposium Support
Applied Materials, Inc.
Session Chairs
Catherine Dubourdieu
Rinus Lee
John Robertson