December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT05.07.03
Enhancing Sensitivity with NeFIB-SIMS—A Material and Parameter Study
When and Where
Dec 4, 2019
11:30am - 11:45am
11:30am - 11:45am
Hynes, Level 2, Room 204
Presenter(s)
Co-Author(s)
Brett Lewis1,Fouzia Khanom1,Christelle Guillermier1
Carl Zeiss SMT Inc1
Keywords
focused ion beam (FIB) | metrology
Symposium Organizers
Frances Allen, University of California, Berkeley
Alex Belianinov, Oak Ridge National Laboratory
Silke Christiansen, Helmholtz Zentrum Berlin für Materialien und Energie
Shane Cybart, University of California, Riverside
Symposium Support
Gold
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Session Chairs
Alex Belianinov
Silke Christiansen