December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.06.39
Atomic Layer Deposition of Titanium Sulfide Thin Films and Its Oxidation in Ambient
When and Where
Dec 3, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Hochul Nam1,Changdeuck Bae1,Hyunjung Shin1
Sungkyunkwan University1
Keywords
atomic layer deposition | oxidation | x-ray photoelectron spectroscopy (XPS)
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Graziella Malandrino
David Munoz-Rojas