December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.01.02
Multi-Scale Modelling and Experimental Analysis of ALD Alumina—Interplay of Process Dynamics, Chemistry and Interfacial Phenomena
When and Where
Dec 2, 2019
8:45am - 9:00am
8:45am - 9:00am
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Constantin Vahlas4,Giorgos Gakis1,Emmanuel Scheid2,Hugues Vergnes3,Andreas Boudouvis1,Brigitte Caussat3
National Technical University of Athens1,LAAS2,Institut National Polytechnique de Toulouse3,CNRS4
Keywords
atomic layer deposition | thin film
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
David Bergsman
Graziella Malandrino