December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.03.06
Nanometal Interconnection Layers Deposited via Site-Specific Chemical Vapor Deposition for High Conductivity Copper-Carbon Nanotube Hybrids
Nanometal Interconnection Layers Deposited via Site-Specific Chemical Vapor Deposition for High Conductivity Copper-Carbon Nanotube Hybrids
When and Where
Dec 3, 2019
9:45am - 10:00am
9:45am - 10:00am
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Anthony Leggiero1,Dylan McIntyre1,Erin Loughran1,Shannon Driess1,Cory Cress2,Ivan Puchades1,Brian Landi1
Rochester Institute of Technology1,U.S. Naval Research Laboratory2
Keywords
C | chemical vapor deposition (CVD) (deposition)
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Kevin Musselman
Greg Randall