December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.12.01

On the Origin of the High Conductivity of Intrinsic ALD-ZnO

When and Where

Dec 6, 2019
8:30am - 8:45am
Hynes, Level 3, Room 310

Presenter(s)

Co-Author(s)

Daniel Hiller1,Dirk König2

The Australian National University1,University of New South Wales2

Keywords

electrical properties

Symposium Organizers

Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS

Symposium Support

Gold
GVD Corporation
Lam Research Corp

Silver
Specialty Coating Systems

Bronze
Waterloo Institute for Nanotechnology

Session Chairs

Karen Gleason
Sven Van Elshocht

In this Session