December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
EL01.20.11
Hydrogenated Amorphous Silicon for Integrated Photonic Waveguides
When and Where
Dec 5, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Juan Villegas1,Boulos Alfakes2,Mahmoud Rasras1
NYU Abu Dhabi1,Khalifa University2
Keywords
plasma-enhanced CVD (PECVD) (chemical reaction) | Si
Symposium Organizers
Wenshan Cai, Georgia Institute of Technology
Mikko Kataja, CSIC-ICMAB
Ho Wai (Howard) Lee, Baylor Univ
Yu-Jung Lu, Academia Sinica
Symposium Support
Bronze
ACS Photonics | ACS Publications
J. A. Woollam Company, Inc.
Raith America, Inc.
ACS Photonics | ACS Publications
J. A. Woollam Company, Inc.
Raith America, Inc.
Session Chairs
Ho Wai (Howard) Lee