December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.02.06
Prospects for Nanostructuring Ultrathin Organic and Hybrid Films via Molecular Layer Deposition
When and Where
Dec 2, 2019
3:30pm - 4:00pm
3:30pm - 4:00pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
David Bergsman1,2,Richard Closser2,Christopher Tassone3,Bruce Clemens2,Dennis Nordlund3,Stacey Bent2
Massachusetts Institute of Technology1,Stanford University2,SLAC National Accelerator Laboratory3
Keywords
atomic layer deposition | nanostructure | thin film
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Sean Barry
Ralf Tonner