December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT06.11.03
Simultaneous In Situ X-Ray Diffraction Topography and Radiography Imaging for Defect Characterization During Silicon Growth
When and Where
Dec 4, 2019
9:30am - 9:45am
9:30am - 9:45am
Hynes, Level 2, Room 209
Presenter(s)
Co-Author(s)
Maike Becker1,Gabrielle Regula1,Serge Neves Dias1,Hadjer Ouaddah1,Guillaume Reinhart1,Nathalie Mangelinck-Noël1
Aix-Marseille Univ., Université de Toulon, CNRS, IM2NP1
Keywords
defects | in situ | Si
Symposium Organizers
Ashwin Shahani, University of Michigan
Guillaume Reinhart, Institut Matériaux Microélectronique Nanosciences de Provence
Damien Tourret, IMDEA
Amy Clarke, Colorado School of Mines
Symposium Support
Gold
Carl Zeiss Microscopy GmbH
Bronze
Protochips Inc.
Carl Zeiss Microscopy GmbH
Bronze
Protochips Inc.
Session Chairs
Sabine Bottin-Rousseau
Damien Tourret