December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.03.05
In Situ Characterization of Metal Oxide Films Produced Using Atmospheric Pressure Spatial ALD
When and Where
Dec 3, 2019
9:30am - 9:45am
9:30am - 9:45am
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Alexander Jones1,Kissan Mistry1,Manfred Kao1,Mustafa Yavuz1,Kevin Musselman1
University of Waterloo1
Keywords
atomic layer deposition | in situ
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Kevin Musselman
Greg Randall