December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.05.01
iCVD and oCVD Thin-Film Multilayer Coatings for Board-Level and Wafer-Level Protection
When and Where
Dec 3, 2019
1:30pm - 1:45pm
1:30pm - 1:45pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Scott Morrison1,William O'Shaughnessy1
GVD Corporation1
Keywords
chemical vapor deposition (CVD) (chemical reaction) | electrical properties | polymer
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Anna Maria Coclite
David Munoz-Rojas