December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.06.08
A Study of Initiated Chemical Vapor Deposition (iCVD) Siloxane Thin-Film Conformality at Different Length Scales
When and Where
Dec 3, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
William Livernois1,Scott Morrison1,William O'Shaughnessy1
GVD Corporation1
Keywords
chemical vapor deposition (CVD) (deposition) | morphology | thin film
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Graziella Malandrino
David Munoz-Rojas