December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.11.04
ALD Process Control towards Fabrication of Reliable Nano-Sized Memristive Devices
When and Where
Dec 5, 2019
2:30pm - 2:45pm
2:30pm - 2:45pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Susanne Hoffmann-Eifert1,Hehe Zhang1,Alexander Hardtdegen1,Felix Cüppers1,Stephan Aussen1
Forschungszentrum Jülich GmbH1
Keywords
atomic layer deposition | electrical properties | thin film
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Mato Knez
David Munoz-Rojas