December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
EL05.03.02
MPACVD Growth of 4-inch Diameter Diamond Films at 2.45GHz with High Uniformity (<5%)
When and Where
Dec 2, 2019
2:00pm - 2:15pm
2:00pm - 2:15pm
Hynes, Level 1, Room 107
Presenter(s)
Co-Author(s)
Alexandre Fiori1,Mariko Suzuki1,Philippe Bergonzo2,3
Seki Diamond Systems, Cornes Technologies Ltd.1,Seki Diamond Systems, Cornes Technologies USA2,University College London3
Keywords
diamond | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Mariko Suzuki, Cornes Technologies Ltd
Thomas Schuelke, Fraunhofer USA
Emmanuel Scorsone, CEA
Satoshi Yamasaki, National Institute of Advanced Industrial Science and Technology
Symposium Support
Silver
Seki Diamond Systems, Cornes Technologies
Bronze
Applied Diamond Inc.
DiamFab
ESIEE Paris - CCIR Paris Ile-de-France
Fraunhofer USA - Center for Coatings and Diamond Technologies
PhDTalent
Plasmability LLC
Seki Diamond Systems, Cornes Technologies
Bronze
Applied Diamond Inc.
DiamFab
ESIEE Paris - CCIR Paris Ile-de-France
Fraunhofer USA - Center for Coatings and Diamond Technologies
PhDTalent
Plasmability LLC
Session Chairs
Matthias Muehle