December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.09.01
Revisited Thermal and Plasma Enhanced Atomic Layer Deposition Processes of Metal Nitrides—Challenges and Opportunities
When and Where
Dec 4, 2019
1:30pm - 2:00pm
1:30pm - 2:00pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Elisabeth Blanquet1,Arnaud Mantoux1,Frederic Mercier1,Raphael Boichot1,Michel Pons1,Carmen Jimenez1
University Grenoble Alpes1
Keywords
atomic layer deposition
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Malancha Gupta
David Munoz-Rojas