December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
SB01.06.24
Development of a Compliant Bipolar Electrostatic Chuck Having 3D-Printed Elastically-Deformable Beams for Handling Large Film
When and Where
Dec 3, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Terumichi Hayashi1,Yuki Taoka1,Pasomphone Hemthavy1,Kunio Takahashi1,Shigeki Saito1
Tokyo Institute of Technology1
Symposium Organizers
Andreas Lendlein, Helmholtz-Zentrum Geesthacht
Michael Dickey, North Carolina State University
Ximin He, University of California, Los Angeles
Pablo Valdivia y Alvarado, Singapore University of Technology and Design
Symposium Support
Bronze
Matter | Cell Press
Multifunctional Materials | IOP Publishing
Matter | Cell Press
Multifunctional Materials | IOP Publishing
Session Chairs
Ximin He
Mutian Hua
Shin-Hyun Kim