December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.06.04
Fabrication of Flexible and Epitaxial Oxide Thin Films on Cleaved Synthetic Mica Using Mist Chemical Vapor Deposition
When and Where
Dec 3, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Yuta Arata1,Hiroyuki Nishinaka1,Daisuke Tahara1,Kazuki Shimazoe1,Yusuke Ito1,Masahiro Yoshimoto1
Kyoto Institution of Technology1
Keywords
chemical vapor deposition (CVD) (deposition) | Ga | O
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Graziella Malandrino
David Munoz-Rojas