April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
NM10.13.07
Effect of Sputter Pressure on Phase Formation, Texture and Stresses in Beta Ta Thin Films
When and Where
Apr 5, 2018
5:00pm - 7:00pm
5:00pm - 7:00pm
PCC North, 300 Level, Exhibit Hall C-E
Presenter(s)
Co-Author(s)
Shefford Baker1,Elizabeth Ellis1,Marku Chmielus2
Cornell University1,University of Pittsburgh2
Keywords
sputtering | Ta | texture
Symposium Organizers
Michael Demkowicz, Texas A&M University
Erica Lilleodden, Helmholtz-Zentrum Geesthacht
Amit Misra, University of Michigan–Ann Arbor
Mitsu Murayama, Virginia Polytechnic Institute and State University
Symposium Support
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.