April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
EP04.08.04
Quantitative Detection of Interstitial Oxygen in Czochralski-Grown Si Crystals Via Unique Matrix-Assisted Calibration In Laser-induced Breakdown Spectroscopy (LIBS)
When and Where
Apr 5, 2018
9:00am - 9:15am
9:00am - 9:15am
PCC North, 200 Level, Room 221 B
Presenter(s)
Co-Author(s)
Dibyendu Mukherjee1,2,Seyyed Ali Davari1,2,Patrick A. Taylor3,Robert W. Standley4
Nano-BioMaterials Laboratory for Energy, Energetics & Environment (nbml-E3)1,University of Tennessee2,ChemTrace, Quantum Global Technologies, LLC Company3,GlobalWafers Co. Ltd.4
Keywords
metrology | Si | spectroscopy
Symposium Organizers
Osamu Ueda, Kanazawa Institute of Technology
Robert Herrick, Intel Corporation
Matteo Meneghini, University of Padova
Kenji Shiojima, University of Fukui
Symposium Support
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
Session Chairs
J. Suda
Osamu Ueda