April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
CM01.09.02
Mechanisms of High-Pressure Tip-Induced Material Removal Toward a Tomographic AFM
When and Where
Apr 5, 2018
11:00am - 11:15am
11:00am - 11:15am
PCC North, 100 Level, Room 131 B
Presenter(s)
Co-Author(s)
Umberto Celano1,Komal Pandey1,2,Lennaert Wouters1,Kristof Paredis1,Thomas Hantschel1,Paul van der Heide1,Wilfried Vandervorst1,2
imec1,KU Leuven2
Keywords
metrology | nanostructure | scanning probe microscopy (SPM)
Symposium Organizers
Laurene Tetard, University of Central Florida
Oleg Kolosov, Lancaster University
Fabian Menges, University of Colorado Boulder
Michael Molinari, Universite de Reims Champagne Ardenne
Symposium Support
SPECS-TII, Inc.
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
Session Chairs
Oleg Kolosov