April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
MA03.05.01
Large-Area Nano-Imprint Lithography Using Scanning Probe Microscopy
When and Where
Apr 4, 2018
5:00pm - 7:00pm
5:00pm - 7:00pm
PCC North, 300 Level, Exhibit Hall C-E
Presenter(s)
Co-Author(s)
Sungsoon Kim1,Sooun Lee1,Gwangmook Kim1,Hyunmin Kim1,Hyesoo Kim1,Wooyoung Shim1
Yonsei University1
Keywords
lithography (deposition) | nanoscale | scanning probe microscopy (SPM)
Symposium Organizers
Sergei Kalinin, Oak Ridge National Laboratory
Jeremy Barton, Nanofactory Corporation
Mitra Taheri, Drexel University
Wu Zhou, University of Chinese Academy of Sciences
Symposium Support
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
Session Chairs
Jeremy Barton
Mitra Taheri