Shigeki Saito

Presentation History

2025 MRS Spring Meeting & Exhibit

Shape Effect of Elastic Supporting Component in Array-Electrode-Type-Electrostatic-Chucks for Next-Generation Semiconductor Fabrication

Apr 8, 2025, 2:45 PM

2024 MRS Fall Meeting & Exhibit

Enhanced Attractive Force via Tip Rotatability in Beam-Type Electrostatic Chuck for Advanced Robotic Applications

Dec 6, 2024, 1:45 PM

2023 MRS Fall Meeting & Exhibit

Effect of Heat-Induced Adjustable Stiffness at the Contact Interface on the Gripping Force of a Bipolar Electrostatic Chuck

Nov 29, 2023, 10:45 AM

2022 MRS Spring Meeting

Influence of The Surface Conductivity of Polymer Films on The Attractive Force of A Bipolar Electrostatic Chuck

May 11, 2022, 10:45 AM

2019 MRS Fall Meeting

Development of a Compliant Bipolar Electrostatic Chuck Having 3D-Printed Elastically-Deformable Beams for Handling Large Film

Dec 3, 2019, 8:00 PM