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Ray Meck

Presentation History

2024 MRS Spring Meeting

300-mm Wafer-Scale Deposition of Ferroelectric HfZrO₂ for High Electrical Performance with Back-End-Of-Line Compatible Conditions

Apr 25, 2024, 3:15 PM

2024 MRS Spring Meeting

Influence of Stack Design on The Electrical Performance of HfZrO₂ Ferroelectric

Apr 25, 2024, 2:15 PM