Development of Devices with Multilayer Graphene and Graphene/Metal-Oxide Thin Films

Graphene exhibits significant potential as a foundational material across diverse applications, including nanoelectronics, biosensing, and high-frequency devices. This is attributed to its exceptional electrical conductivity, low density, and flexibility. However, the deposition of dielectric materials on graphene at elevated temperatures and in the presence of ambient oxygen poses substantial challenges, as these conditions often lead to considerable degradation of graphene.
In this study, we introduce a process (using pulsed laser deposition) for fabricating multilayered graphene followed by growing metal-oxide thin films at high temperatures, which mitigates the degradation of graphene quality. We will also explore the feasibility of the proposed process to manufacture bulk acoustic wave (BAW) resonators without the need for a Bragg reflector and back-etched substrate and provide insights into the fabrication conditions and performance of the device.