Dynamic EUV scatterometry measurements of nanoscale heat flow in 3D geometries and next-generation semiconductors

When and Where

Apr 9, 2025
5:00pm - 7:00pm

Summit, Level 2, Flex Hall C

Presenter(s)

Brendan McBennett

Joshua Knobloch

Albert Beardo Ricol

Emma Nelson

Theodore Culman

Anya Grafov

Na Li

Yuka Esashi

Michael Tanksalvala

Justin Shaw

Henry Kapteyn

Margaret Murnane

Co-Author(s)

Brendan McBennett^1,2,Joshua Knobloch²,Albert Beardo Ricol²,Emma Nelson²,Theodore Culman²,Anya Grafov²,Na Li²,Yuka Esashi²,Michael Tanksalvala^1,2,Justin Shaw¹,Henry Kapteyn²,Margaret Murnane²

National Institute of Standards and Technology¹,STROBE, JILA, University of Colorado Boulder²

Keywords

spectroscopy | thermal conductivity

Symposium Organizers

Yee Kan Koh, National University of Singapore

Zhiting Tian, Cornell University

Tianli Feng, University of Utah

Hyejin Jang, Seoul National University

Session Chairs

Tianli Feng

Yee Kan Koh

Symposium Supporters

2025 MRS Spring Meeting & Exhibit