April 22 - 26, 2024
Seattle, Washington
May 7 - 9, 2024 (Virtual)

Event Supporters

2024 MRS Spring Meeting
CH02.09.04

AFM-SEM Correlative Microscopy Imaging for TEM Grid Mounted Samples

When and Where

Apr 26, 2024
2:45pm - 3:00pm
Room 440, Level 4, Summit

Presenter(s)

Co-Author(s)

Kerim Arat1,Stefano Spagna1,Will Neils1,Christian Schwalb2,Hajo Frerichs2,Sebastian Seibert2,Lukas Stuhn2,Marion Wolff2

Quantum Design Inc.1,Quantum Design Microscopy GmbH2

Abstract

Kerim Arat1,Stefano Spagna1,Will Neils1,Christian Schwalb2,Hajo Frerichs2,Sebastian Seibert2,Lukas Stuhn2,Marion Wolff2

Quantum Design Inc.1,Quantum Design Microscopy GmbH2
Microscopists utilizing Transmission Electron Microscopy (TEM) and TEM based Energy Electron Loss Spectroscopy (EELS) in their studies, frequently require the characterization of physical parameters such as heights and cross-sectional shapes of the examined sample<sup>1</sup>. Because of the typical sub-five nanometer thickness of membranes in TEM grids, Atomic Force Microscopy (AFM) measurements of grid mounted samples are presently challenging and time consuming. In this paper, we present the first truly integrated AFM and Scanning Electron Microscope (SEM) correlative workstation<sup>2</sup>, which allows imaging of samples directly on a TEM grid, utilizing these two techniques. The highly integrated and easy-to-use AFM-SEM microscopy workstation opens unprecedented measurement capabilities at the nanoscale in challenging geometries. AFM-SEM imaging of TEM grid mounted samples simplifies measurement workflows to yield a higher rate of data output. In addition to topography measurement, the platform allows easy expansion of capabilities, such as elemental analysis via Energy Dispersive X-ray Spectroscopy (EDS). The rich set of AFM modes (Contact, Tapping, Off-resonance, Conductive, Magnetic, and Electrostatic) allows the extraction of various physical properties from the sample.<br/><br/><br/>1 V. Reiseckr et al., “Spectral Tuning of Plasmonic Activity in 3D Nanostructures via Highly-Precision Nano-Printing”, Adv. Funct. Mater. 2023, 2310110.<br/>2 A. Alipour et al. “A highly integrated AFM-SEM Correlative Analysis Platform,” Microscopy today, Vol. 31, Issue 6, Nov. 2023, 23-27.

Keywords

in situ | scanning transmission electron microscopy (STEM) | transmission electron microscopy (TEM)

Symposium Organizers

Qianqian Li, Shanghai University
Leopoldo Molina-Luna, Darmstadt University of Technology
Yaobin Xu, Pacific Northwest National Laboratory
Di Zhang, Los Alamos National Laboratory

Symposium Support

Bronze
DENSsolutions

Session Chairs

Qianqian Li
Qianqian Li
Leopoldo Molina-Luna
Yaobin Xu
Di Zhang

In this Session