Integrated Ultrathin Ferroelectrics in Negative Capacitance Transistors towards Energy-Efficient High-Performance Computing

With the exponentially increasing demand for high-performance computing, the energy efficiency of transistors must continue to improve [1]. In particular, negative capacitance (NC) [2] in ferroelectric materials has emerged as a route to increase the gate capacitance, i.e. lower equivalent oxide thickness (EOT), of a transistor which can reduce the operating voltage and therefore power. However, integration of NC gate oxides in advanced silicon transistors requires ferroelectric stabilization in the ultrathin (sub-2 nm) regime on silicon, which is a significant materials challenge for conventional ferroelectrics. To overcome this, we stabilized ferroelectricity on silicon down to 1 nm [3-4] and 0.5 nm [5] in doped HfO₂ and undoped ZrO₂, respectively, which are the high-κ dielectrics used in today’s advanced logic and memory devices. Notably, these ultrathin ferroelectrics demonstrate signatures of ultrathin-enhanced polarization [3-5], in strong contrast to conventional perovskite oxide-based ferroelectrics.<br/><br/>Next, we leveraged the competing atomic-scale antiferroelectric-ferroelectric orders to design NC in 1.8-nm HfO₂-ZrO₂ superlattices [6-8] and 1-nm ZrO₂[9], the thicknesses used in today’s advanced transistors and future node transistors, respectively. In contrast to the conventional ferroelectric-dielectric picture for NC stabilization, the microscopic origin of NC in these gate oxides is mixed antiferroelectric-ferroelectric order, which broadens the materials space for NC realization. Furthermore, this work establishes the first demonstrations of capacitance enhancement [6-9] in the technologically-relevant HfO₂-ZrO₂ system, resulting in record-low EOT down to 5 Å [6-9]. Accordingly, when these NC gate oxides were integrated within transistors [6-9], due to the increase in gate capacitance without degradation in carrier velocity and reliability [6-7], record high ON current and transconductance was obtained at 90 nm channel lengths [8-9]. Additionally, there are early indications of industrial adoption as the 1.8-nm HfO₂-ZrO₂ superlattice gate stack has successfully been integrated within a US Defense CMOS R&D Foundry [8] and an advanced FinFET transistor process in an industrial semiconductor foundry [10]. Overall, the materials breakthroughs in this work—ultrathin ferroelectricity and negative capacitance—in the simple CMOS-compatible HfO₂-ZrO₂ material system provides a new route towards energy-efficient computing.<br/><br/>[1] S Datta <i>et al.</i> “Toward attojoule switching energy in logic transistors.” <i>Science</i> 378, 733 (2022).<br/>[2] S Salahuddin & S Datta. “Use of Negative Capacitance to Provide Voltage Amplification for Low Power Nanoscale Devices. <i>Nano Lett</i>. 8, 405–410<br/>[3] S Cheema, D Kwon, <u>N Shanker</u> <i>et al</i>. “Enhanced ferroelectricity in ultrathin films grown directly on silicon.” <i>Nature</i> 580, 478–482 (2020).<br/>[4] S Cheema*, <u>N Shanker*</u> <i>et al</i>. “One nanometer HfO2-based ferroelectric tunnel junctions on silicon.” <i>Adv. Electron. Mater.</i> 8, 2100499 (2022).<br/>[5] S Cheema*, <u>N Shanker*</u> <i>et al</i>. “Emergent ferroelectricity in subnanometer binary oxide films on silicon.” <i>Science</i> 376, 648–652 (2022).<br/>[6] S Cheema*, <u>N Shanker*</u> <i>et al</i>., “Ultrathin ferroic HfO₂–ZrO₂ superlattice gate stack for advanced transistors.” <i>Nature </i>604, 65 (2022).<br/>[7] <u>N Shanker</u> <i>et al</i>. “On the PBTI Reliability of Low EOT Negative Capacitance 1.8 nm HfO₂-ZrO₂ Superlattice Gate Stack on L_g =90 nm nFETs.” in <i>2022 IEEE Symposium on VLSI Technology and Circuits</i> (IEEE, 2022).<br/>[8] <u>N Shanker</u> <i>et al</i>. “CMOS Demonstration of Negative Capacitance HfO₂-ZrO₂ Superlattice Gate Stack in a Self-Aligned, Replacement Gate Process”. in <i>2022 International Electron Devices Meeting </i>(IEEE, 2022).<br/>[9] <u>N Shanker</u> <i>et al.</i> “Ultralow equivalent oxide thickness via one nanometer ferroelectric negative capacitance.” <i>In preparation</i><br/>[10] S Jo <i>et al</i>. “Negative differential capacitance in ultrathin ferroelectric hafnia.” <i>Nature Electronics</i>. 6, 390 (2023).